Monday 4^th June 2012: 09:00 – 12:30
 

We begin with a review of the theory of operation of interferometers generally, using language and visuals accessible to a broad audience. We then proceed to current “hot topics” in the development of metrology tools for precision engineered surfaces. A survey of instruments takes us to automated phase shifting systems for testing optical components to interference microscopy for surface shape and texture analysis. Armed with this background, we proceed to applications, best practice, data interpretation, uncertainty analysis and presentation; supported by a gallery of examples including optical lenses and mirrors, automotive parts, semiconductors, data storage devices, medical implants, and micro-machined components.

This course enables you to:
• Describe the principles of interferometry, including its history and development
• Determine when an interferometer is the best solution to a metrology problem
• Select an instrument, measurement mode and filtering option to get the job done

The intended audience includes R&D scientists, process and quality control engineers, and measurement specialists from all applications areas requiring high-precision, high-resolution surface characterization. 

This is an intermediate level course, with material ranging from basic to complex, to provide both an overview and reference for further study. All topics will be covered first at the conceptual level; then each will be treated with appropriate analytical tools. Most topics require no more than simple algebra and trigonometry; a few require mathematical skills typical for graduate engineers.

Prof. Chris J. Evans, Center for Precision Metrology, UNC Charlotte, Charlotte, North Carolina , USA

Dr. Peter J. de Groot, Director of R&D, Zygo Corporation, Middlefield, Connecticut, USA